JPH0581069B2 - - Google Patents
Info
- Publication number
- JPH0581069B2 JPH0581069B2 JP60500400A JP50040085A JPH0581069B2 JP H0581069 B2 JPH0581069 B2 JP H0581069B2 JP 60500400 A JP60500400 A JP 60500400A JP 50040085 A JP50040085 A JP 50040085A JP H0581069 B2 JPH0581069 B2 JP H0581069B2
- Authority
- JP
- Japan
- Prior art keywords
- line
- bit
- gate
- tunneling
- bit ground
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007667 floating Methods 0.000 claims description 51
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 41
- 229920005591 polysilicon Polymers 0.000 claims description 41
- 230000005641 tunneling Effects 0.000 claims description 41
- 239000002184 metal Substances 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims description 3
- 210000004027 cell Anatomy 0.000 description 78
- 101100521334 Mus musculus Prom1 gene Proteins 0.000 description 20
- 238000002955 isolation Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 230000006870 function Effects 0.000 description 5
- 210000003719 b-lymphocyte Anatomy 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/68—Floating-gate IGFETs
- H10D30/681—Floating-gate IGFETs having only two programming levels
- H10D30/683—Floating-gate IGFETs having only two programming levels programmed by tunnelling of carriers, e.g. Fowler-Nordheim tunnelling
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
- G11C16/0408—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors
- G11C16/0441—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors comprising cells containing multiple floating gate devices, e.g. separate read-and-write FAMOS transistors with connected floating gates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Non-Volatile Memory (AREA)
- Read Only Memory (AREA)
- Semiconductor Memories (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US568668 | 1984-01-06 | ||
US06/568,668 US4654825A (en) | 1984-01-06 | 1984-01-06 | E2 prom memory cell |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4331611A Division JPH05267690A (ja) | 1984-01-06 | 1992-12-11 | E2promメモリセル |
JP5163539A Division JPH06163918A (ja) | 1984-01-06 | 1993-07-01 | E2promメモリセル |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61500939A JPS61500939A (ja) | 1986-05-08 |
JPH0581069B2 true JPH0581069B2 (en]) | 1993-11-11 |
Family
ID=24272236
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60500400A Granted JPS61500939A (ja) | 1984-01-06 | 1984-12-24 | E2promメモリ装置 |
JP4331611A Pending JPH05267690A (ja) | 1984-01-06 | 1992-12-11 | E2promメモリセル |
JP5163539A Pending JPH06163918A (ja) | 1984-01-06 | 1993-07-01 | E2promメモリセル |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4331611A Pending JPH05267690A (ja) | 1984-01-06 | 1992-12-11 | E2promメモリセル |
JP5163539A Pending JPH06163918A (ja) | 1984-01-06 | 1993-07-01 | E2promメモリセル |
Country Status (4)
Country | Link |
---|---|
US (1) | US4654825A (en]) |
EP (1) | EP0167595A4 (en]) |
JP (3) | JPS61500939A (en]) |
WO (1) | WO1985003162A1 (en]) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5172196A (en) * | 1984-11-26 | 1992-12-15 | Kabushiki Kaisha Toshiba | Nonvolatile semiconductor memory device |
US4742492A (en) * | 1985-09-27 | 1988-05-03 | Texas Instruments Incorporated | EEPROM memory cell having improved breakdown characteristics and driving circuitry therefor |
US4783766A (en) * | 1986-05-30 | 1988-11-08 | Seeq Technology, Inc. | Block electrically erasable EEPROM |
JPH0787219B2 (ja) * | 1986-09-09 | 1995-09-20 | 三菱電機株式会社 | 半導体記憶装置 |
JP2688492B2 (ja) * | 1987-06-19 | 1997-12-10 | アドバンスト・マイクロ・デバイシズ・インコーポレイテッド | 電気的消去可能プログラマブルリードオンリメモリ |
DE3807162A1 (de) * | 1987-07-02 | 1989-01-12 | Mitsubishi Electric Corp | Halbleiterspeichereinrichtung |
US5005155A (en) * | 1988-06-15 | 1991-04-02 | Advanced Micro Devices, Inc. | Optimized electrically erasable PLA cell for minimum read disturb |
US5101378A (en) * | 1988-06-15 | 1992-03-31 | Advanced Micro Devices, Inc. | Optimized electrically erasable cell for minimum read disturb and associated method of sensing |
US5020030A (en) * | 1988-10-31 | 1991-05-28 | Huber Robert J | Nonvolatile SNOS memory cell with induced capacitor |
US5308783A (en) * | 1992-12-16 | 1994-05-03 | Siemens Aktiengesellschaft | Process for the manufacture of a high density cell array of gain memory cells |
JP2663863B2 (ja) * | 1994-04-19 | 1997-10-15 | 日本電気株式会社 | 不揮発性半導体記憶装置 |
EP0778581B1 (en) * | 1995-12-07 | 2002-08-14 | Samsung Electronics Co., Ltd. | Nonvolatile memory device |
WO2016122509A1 (en) * | 2015-01-29 | 2016-08-04 | Hewlett-Packard Development Company, L.P. | Integrated circuits |
JP2023089475A (ja) * | 2021-12-16 | 2023-06-28 | タワー パートナーズ セミコンダクター株式会社 | 半導体装置 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4203158A (en) * | 1978-02-24 | 1980-05-13 | Intel Corporation | Electrically programmable and erasable MOS floating gate memory device employing tunneling and method of fabricating same |
US4377818A (en) * | 1978-11-02 | 1983-03-22 | Texas Instruments Incorporated | High density electrically programmable ROM |
US4266283A (en) * | 1979-02-16 | 1981-05-05 | Intel Corporation | Electrically alterable read-mostly memory |
JPS55111173A (en) * | 1979-02-20 | 1980-08-27 | Nec Corp | Semiconductor memory device |
US4342099A (en) * | 1979-06-18 | 1982-07-27 | Texas Instruments Incorporated | Electrically erasable programmable MNOS read only memory |
US4467453A (en) * | 1979-09-04 | 1984-08-21 | Texas Instruments Incorporated | Electrically programmable floating gate semiconductor memory device |
US4317272A (en) * | 1979-10-26 | 1982-03-02 | Texas Instruments Incorporated | High density, electrically erasable, floating gate memory cell |
JPS56108259A (en) * | 1980-02-01 | 1981-08-27 | Hitachi Ltd | Semiconductor memory device |
US4366555A (en) * | 1980-08-01 | 1982-12-28 | National Semiconductor Corporation | Electrically erasable programmable read only memory |
DE3136517C2 (de) * | 1980-09-26 | 1985-02-07 | Tokyo Shibaura Denki K.K., Kawasaki, Kanagawa | Nichtflüchtige Halbleiter-Speichervorrichtung |
US4379343A (en) * | 1980-11-28 | 1983-04-05 | Hughes Aircraft Company | Electrically erasable programmable read-only memory cell having a shared diffusion |
JPS57141969A (en) * | 1981-02-27 | 1982-09-02 | Toshiba Corp | Nonvolatile semiconductor memory |
JPS5834979A (ja) * | 1981-08-27 | 1983-03-01 | Nec Corp | 不揮発性半導体記憶装置およびその製造方法 |
US4477825A (en) * | 1981-12-28 | 1984-10-16 | National Semiconductor Corporation | Electrically programmable and erasable memory cell |
US4471471A (en) * | 1981-12-31 | 1984-09-11 | International Business Machines Corporation | Non-volatile RAM device |
US4558344A (en) * | 1982-01-29 | 1985-12-10 | Seeq Technology, Inc. | Electrically-programmable and electrically-erasable MOS memory device |
-
1984
- 1984-01-06 US US06/568,668 patent/US4654825A/en not_active Expired - Lifetime
- 1984-12-24 EP EP19850900557 patent/EP0167595A4/en not_active Withdrawn
- 1984-12-24 WO PCT/US1984/002107 patent/WO1985003162A1/en not_active Application Discontinuation
- 1984-12-24 JP JP60500400A patent/JPS61500939A/ja active Granted
-
1992
- 1992-12-11 JP JP4331611A patent/JPH05267690A/ja active Pending
-
1993
- 1993-07-01 JP JP5163539A patent/JPH06163918A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
WO1985003162A1 (en) | 1985-07-18 |
US4654825A (en) | 1987-03-31 |
JPH06163918A (ja) | 1994-06-10 |
EP0167595A4 (en) | 1988-02-03 |
JPH05267690A (ja) | 1993-10-15 |
EP0167595A1 (en) | 1986-01-15 |
JPS61500939A (ja) | 1986-05-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5350938A (en) | Nonvolatile semiconductor memory circuit with high speed read-out | |
EP0053878B1 (en) | Semiconductor memory device | |
KR100355662B1 (ko) | 반도체 비휘발성 메모리 및 어레이 그리고 그것의 동작 방법 | |
US5557569A (en) | Low voltage flash EEPROM C-cell using fowler-nordheim tunneling | |
US4531203A (en) | Semiconductor memory device and method for manufacturing the same | |
US8278700B2 (en) | Semiconductor device | |
KR960008739B1 (ko) | 1개의 트랜지스터 메모리 셀의 어레이를 갖고 있는 전기적으로 소거가능하고 프로그램가능한 판독 전용 메모리 | |
EP0054355B1 (en) | Semiconductor memory device | |
JPH05211338A (ja) | 不揮発性半導体装置 | |
JPH0451917B2 (en]) | ||
JPH0581069B2 (en]) | ||
US6031771A (en) | Memory redundancy circuit using single polysilicon floating gate transistors as redundancy elements | |
US5572464A (en) | Semiconductor memory device and method of using the same | |
EP0946988B1 (en) | Memory redundancy circuit using single polysilicon floating gate transistors as redundancy elements | |
JPS6228518B2 (en]) | ||
US4511996A (en) | Memory cell having a double gate field effect transistor and a method for its operation | |
US6307229B2 (en) | Nonvolatile semiconductor memory device structure with superimposed bit lines and short-circuit metal strips | |
EP0647947A2 (en) | Low voltage flash EEPROM X-cell using Fowler-Nordheim tunneling | |
JP3540881B2 (ja) | 不揮発性半導体記憶装置の書き込み方法 | |
JPH05136376A (ja) | 半導体不揮発性記憶装置とその書き込み方法 | |
JPH0581070B2 (en]) | ||
JPS6146979B2 (en]) | ||
JPH08125041A (ja) | 不揮発性半導体メモリ装置およびその読み出し/書き込み方法 | |
JPH0332067A (ja) | 不揮発性半導体記憶装置 | |
JPH01273349A (ja) | 半導体装置の製造方法 |